Cartridge Dispense System
A cost-effective, flexible dispense unit.
Our Cartridge Dispense System (CDS) is a cost effective, flexible dispense unit. The controller will interface with the Tractrix Spin Tool and the SpinBall Single-wafer Spin System.
Features
- Dispenses most lithographic chemistries in both low and high viscosity
- Dispense accuracy ±0.1ml
- 175 ml capacity permits processing a full cassette of wafers without refilling
- Low hold-up volume (5.6 ml with 26” of dispense tubing)
- Depressurized between dispenses to prevent N2 absorption.
- Disposable cartridge liners facilitate easy chemical changes