Tractrix™ Spin Tool

Product Summary: 
Tractrix, stand-alone, automatic spin tool for 2” to 450mm substrates

The Tractrix™ tool is our top-of-the-line, spin track. If you process substrates from 2" to 450mm, need PC control and programmability, and require uniformity on a par with tier-1 systems, you've come to the right place. The Tractrix™ product not only encompasses all of the above, it fits into a very small footprint with an equally small price tag.

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Production -
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R&D -
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Special applications
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For
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Substrates: silicon, compound semi (GaAs, others), glass
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Substrate shapes: round, square, rectangle
Benefits: 
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Precise, repeatable results
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Competitive cost
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Low maintenance
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EZ-Switch™ quick, easy substrate size conversion
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Sof-Touch™ wafer handling for efficient and smooth indexing, pick-and-place, positioning and transfer
Features: 
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Proprietary, single axis linear transfer arm
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Automated centering of 2 different substrates
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Requires far less maintenance than any other track system utilizing multi-axis robotic transfer
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Interfaces available for most chemical pumps - Cybor,
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Combined coat & develop system configuration for cost-savings
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Intuitive Windows-Xp based GUI -
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For
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Bake temperature 50-200⁰C standard -
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Spin Speed – 10-6,000 RPMs –
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Back up program retention (flash drive)
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Advanced mechanical positioning and control systems
Product Outro: 

Whether your process is g-line, i-line, DUV, or something completely unique, Spintrac Systems' Tractrix™ systems can be configured accordingly.

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