Cartridge Dispense System

Data Sheet: 
Product Summary: 
A cost-effective, flexible dispense unit.

Our Cartridge Dispense System (CDS) is a cost effective, flexible dispense unit. The controller will interface with the Tractrix Spin Tool and the SpinBall Single-wafer Spin System.

Features: 
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Dispenses most lithographic chemistries in both low and high viscosity
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Dispense accuracy ±0.1ml
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175 ml capacity permits processing a full cassette of wafers without refilling
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Low hold-up volume (5.6 ml with 26” of dispense tubing)
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Depressurized between dispenses to prevent N2 absorption.
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Disposable cartridge liners facilitate easy chemical changes
Position: 
3