Cartridge Dispense System

A cost-effective, flexible dispense unit.

Our Cartridge Dispense System (CDS) is a cost effective, flexible dispense unit. The controller will interface with the Tractrix Spin Tool and the SpinBall Single-wafer Spin System.

Features

  • Dispenses most lithographic chemistries in both low and high viscosity
  • Dispense accuracy ±0.1ml
  • 175 ml capacity permits processing a full cassette of wafers without refilling
  • Low hold-up volume (5.6 ml with 26” of dispense tubing)
  • Depressurized between dispenses to prevent N2 absorption.
  • Disposable cartridge liners facilitate easy chemical changes